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Listing of Some Material Parameters Relevant to Uses with Electronic Circuits.
Electrical
Resistivity
Dielectric Constant, Dielectric Strength (Breakdown), etc.
Band Structures, Band Gap
Mobility
Wide Range of Device Characteristics
Contact Potentials
Chemical
Chemical Activity for Processes, Degradation
Chemical Bonding
Electrical Affinity
Phase Diagrams
Chemical Potential
Thermal
Melt Point
Latent Heats of Phase Transformations (Fusion, etc.)
Thermal Expansion
Vapor Pressure, Sublimation
Diffusion Coefficient
Specific Heat
Thermal Conductivity
Mechanical
Elastic Modulus (Various)
Tensile Strength
Elastic-Plastic Characteristics, Yield Point, etc.
Toughness, Hardness
Fatigue Durability
Poisson's Ratio
Acoustical
Creep
Friction, Adhesion, Wear
Structural
Single Crystal, Polycrystal, Amorphous, Epitaxial, etc.
Physical Properties of Several Semiconductors and Diamond
Physical Properties of Semiconductor Materials. Note: Data compiled by Texas Instruments.
Material
Density (g/cm3)
Hardness (kg/mm2)
Flexure Strength (KPSI)
Young's Modulus (GPa)
Thermal Exp. Coeff. (10-6/oK) at 23oC
Thermal Exp. Coeff. (10-6/oK) at 200oC
Specific Heat (J/gmoK)
Thermal Conductivity (W/cmoK)
Band Gap (eV)
ZnS
4.08
230
14
74.5
6.8
7.7
0.468
0.17
3.58
GaAs
5.32
700
8
85.5
5.7
6.4
0.345
0.53
1.43
GaP
4.13
845
15
102.6
5.3
5.8
0.435
0.97
2.24
Si
2.33
1150
18.5
130.1
2.3
2.9
0.758
1.41
1.12
Ge
5.32
850
13.5
103.3
6.0
Liquid
0.310
0.60
0.67
Diamond
3.52
9000
427
1050
1.0
2.0
0.515
26.00
5.40
Phase Diagrams
Coefficients of Thermal Expansion and Resistivity
Thermal mismatch between materials is a major source of concern in microelectronics. A large mismatch in the coefficient of thermal expansion (TCE) between two bonded materials can result in large stresses and even cracking, delamination, or other types of failure. The following graphs show various TCE values for selected materials used in microelectronics processing and packaging. The larger the difference, the more concern there is for failure.
Coefficients of Thermal Expansion (Higher) for Selected Microcircuit Materials (see Figure 12)
Coefficients of Thermal Expansion (Lower and Polymers) for Selected Microcircuit Materials (see Figures 12 and 13)
Resistivity of Metals
Metal systems used in microelectronics are typically tradeoffs between performance, reliability, ease of which to process, and contamination issues. Resistivity is typically an important factor when considering circuit performance. Below is a graph of resistivity for various metals used in microelectronic processing.
Resistivity Values for Various Metals (see Figure 14).
Thermal Conductivity Values for Various Metals (see Figure 15).